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Low temperatures In-situ doping Active layer Microcapteurs Resistor Organic field effect transistors Basse température Silicon Inkjet printing CMOS integrated circuits Spacer method Titanium nitride ICP-CVD Organic electronics Amorphous materials Temperature Integrated optics Μ-Si doped Microfluidique Sensitivity Sphingomyelin Gel/fluid phase transition Chemical sensor Plasma etching Silicium Chemical sensors Photonique intégrée Microelectronics Low temperature Couches minces Gas sensor Synthesis Nanofils Thin Film Transistors Organic semiconductors Microresonators Flexible substrate Photoluminescence Microfluidic Sensors Fatty acid Photonic Chemical detection Sphingomyelin lipids Polycrystalline materials Low-frequency noise Bridged cyclo-oligophenylenes PECVD Infrared LPCVD Organic semiconductor Low-cost silicon nanowires devices Silicon nanowires Photonics Diazonium salts Chalcogenide Copper Deep UV polymer Microsensors Nanoribbons Photodetector Electrical performance Méthode des espaceurs Polymer Thin film transistors Polysilicon Micro-resonators Procédé SLS Stabilité électrique Microcrystalline silicon Mid-IR Electrical stability Density of states Deformation PH SLS process Sensor Integrated photonics Field effect transistors CMOS compatible Nanowires Organic electronic devices Fonctionnalisation de surface Micro-résonateurs Reproducibilities Functionalization Flexible electronics Doping Polymers Organic field effect transistor Nanofils de silicium Resistors Silicium microcristallin Carbon nanotubes Electrodes Resonators Polycrystalline silicon Microcapteur Low temperature electronics Thin films