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Plasma etching Flexible substrate Chemical sensor Organic semiconductors Sensitivity Low-cost silicon nanowires devices Polymers Atomic ratio Chemical detection Au-catalyseur Silicon Thin film circuits Nanowires Photonic Microfluidique Doping 1/ noise Electrodes Amorphous materials Inkjet printing Electrical stability Microcapteurs Thin films Additive Transfer Band gap emission Photoluminescence TFT Μc-Si TFT Polymer Microelectronics Polycrystalline silicon Stretchable electronics Bins Sphingomyelin lipids Aluminum nitride CMOS compatible Copper Bacteria detection Fonctionnalisation de surface Microcrystalline silicon Au-catalyst Reproducibilities Nanofils de silicium Thin film Organic field effect transistors Diazonium salts Electrical performance Analyse Raman Microfluidic Aryl-diazonium salts Chemical sensors Active layer Gas sensor Nanoribbons Sensor 2D-Numerical Simulation Couches minces 3D electronics Deformation Advanced glasses Polycrystalline materials Gel/fluid phase transition Temperature Microsensors PH Integrated photonics Synthesis Microcapteur Resistor Biochemical sensing Annealing effect Polysilicon Carbon nanotubes Ammonia sensor Biocapteur Functionalization Low-frequency noise Field effect transistors Titanium nitride Silicon nanowires Transistor à effet de champ organique Flexible electronics 3D structure Bio-sensor Thin film transistors Deep UV polymer Sensors In-situ doping Micro-resonators A-SiH Ammonia detection Access resistance 1/f noise Article Low temperatures CMOS integrated circuits Additive manufacturing Chalcogenide Mid-IR Resistors