TiO 2 –SiO 2 nanocomposite thin films deposited by direct liquid injection of colloidal solution in an O 2 /HMDSO low-pressure plasma

Maria Mitronika (1) , Jacopo Profili (2) , Antoine Goullet (1) , Nicolas Gautier (1) , Nicolas Stephant (1) , Luc Stafford (2) , Agnès Granier (1) , Mireille Richard-Plouet (1)

1 IMN - Institut des Matériaux Jean Rouxel
2 UdeM - Université de Montréal

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Maria Mitronika, Jacopo Profili, Antoine Goullet, Nicolas Gautier, Nicolas Stephant, et al.. TiO 2 –SiO 2 nanocomposite thin films deposited by direct liquid injection of colloidal solution in an O 2 /HMDSO low-pressure plasma. Journal of Physics D: Applied Physics, 2021, 54 (8), pp.085206. ⟨10.1088/1361-6463/abc84d⟩. ⟨hal-03105414⟩