Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement

Christyves Chevallier 1 Frédéric Genty 1 Joel Jacquet 1 Nicolas Fressengeas 1
1 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes
Abstract : A high reflectivity and polarization selective high contrast grating mirror has been designed with the use of an automated optimization algorithm. Through a precise study of the tolerance of the different lengths of the structure, the robustness with respect to the fabrication errors has been enhanced to high tolerance values between 5 % and 210 %. This adjustment of the dimensions of the structure leads to a 250 nm large bandwidth mirror well adapted for a VCSEL application at λ = 2.65 µm and can easily be scaled for other wavelengths.
Keywords : high contrast grating mirror parameter tolerant VCSEL mirror
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https://hal-supelec.archives-ouvertes.fr/hal-00628574
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Submitted on : Thursday, November 17, 2011 - 2:35:20 PM
Last modification on : Wednesday, June 26, 2019 - 1:16:07 PM
Long-term archiving on: Saturday, February 18, 2012 - 2:21:05 AM

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Christyves Chevallier, Frédéric Genty, Joel Jacquet, Nicolas Fressengeas. Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: robustness enhancement. Optics and Laser Technology, Elsevier, 2012, 44, pp.626-630. ⟨10.1016/j.optlastec.2011.09.010⟩. ⟨hal-00628574⟩

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